Presentation Information

[FTu1-04]Formation of pn Junctions by Doping Using Excimer Laser Annealing

*Ren Aoki1, Keita Katayama1, Daisuke Nakamura1, Hisato Yabuta1, Hiroshi Ikenoue1, Taizoh Sadoh1 (1. Kyushu University)

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Paper will be available on August 28, 2023 (Japan Standard Time/GMT+9:00).