Presentation Information
[PDW-05]SiN/Si Heterogeneous Integration with Butt-coupling
*Ryo Sugano1, Ryo Otake1, Ryo Nishihata1, Shun Fujii2, Takasumi Tanabe1 (1. Department of Electronics and Electrical Engineering, Faculty of Science and Technology, Keio University, 2. Department of Physics, Faculty of Science and Technology, Keio University)
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