Presentation Information
[PFTu-02]Silicon laser doping of β-Ga2O3 by KrF excimer laser irradiation
*Misa Beppu1, Yoshiaki Kakimoto1,2, Daisuke Nakamura1, Tetsuya Goto3, Hiroshi Ikenoue4 (1. Graduate School of Information Science and Electrical Engineering, Kyushu University, 2. Department of Gigaphoton NEXT GLP, Kyushu University, 3. New Industry Creation Hatchery Center, Tohoku University, 4. Kochi University of Technology)
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