[340307-11] MS-06-4

4:10 PM - 4:30 PM JST(7:10 AM - 7:30 AM UTC)

[340307-11-03] Dislocation dynamics analysis of the influence of off-angle on basal plane dislocation behavior in 4H-SiC

*Noboru Takahashi¹, Atsuo Hirano¹, Akiyuki Takahashi¹ (1. Tokyo University of Science)

Keywords:

Dislocation dynamics,4H-SiC,BPD,Off-angle