[TuP3F] F. Low dimensional materials and structures

[TuP3F-05] CVD growth of Single-Crystal Bilayer 2H-MoTe₂

〇Tomoya Ebisawa¹, Kenji Watanabe², Takashi Taniguchi², Yusuke Hoshi¹ (1. Tokyo City Univ. (Japan), 2. National Institute of Materials Science (Japan))

Molybdenum ditelluride (MoTe₂) is a transition metal dichalcogenide exhibiting polymorphic structures, including the semiconducting 2H phase, which shows optical emission in the near-infrared region. In this study, few-layer 2H-MoTe2 was synthesized by chemical vapor deposition using ammonium heptamolybdate (AHM) as a Mo precursor. We investigate the effects of growth temperature on the crystal structure and optical properties. 2H-MoTe₂ growth were confirmed only in the substrate temperature of 760–800°C and the number of layers was mainly bilayer independent of growth temperature. Photoluminescence measurements revealed clear optical emissions, implying the CVD-grown bilayer Mote₂ with high quality.