Presentation Information
[P-035]Monolithic 4H-SiC Nanomechanical Resonators with High Intrinsic Quality Factors
André Hochreiter1, Philipp Bredol2, *Felix David2, Berke Demiralp2, Heiko B. Weber1, Eva M. Weig2,3,4 (1. Friedrich-Alexander-University of Erlangen-Nürnberg, Chair of Applied Physics (Germany), 2. Technical University of Munich, Chair of Nano and Quantum Sensors (Germany), 3. Munich Center for Quantum Science and Technology (MCQST) (Germany), 4. TUM Center for Quantum Engineering (ZQE) (Germany))