[P] Poster Session

5:30 PM - 7:30 PM JST(8:30 AM - 10:30 AM UTC)

[P-088] Nanomechanical resonators in strained, piezoelectric AlN

Anastasiia Ciers¹, Alexander Jung¹, Joachim Ciers¹, Laurentius Radit Nindito¹, *Hannes Pfeifer¹, Armin Dadgar², André Strittmatter², Witlef Wieczorek¹ (1. Department of Microtechnology and Nanoscience (MC2), Chalmers University of Technology (Sweden), 2. Institute of Physics, Otto-von-Guericke-University Magdeburg (Germany))