[Th] Oral Session

4:30 PM - 4:55 PM JST(7:30 AM - 7:55 AM UTC)

[Th-10] Laser Micromachining of Silicon Nitride Trampolines Operating at the Fundamental Temperature Fluctuation-Noise Limit

Zachary Louis-Seize¹, Yahya Saleh¹, Chang Zhang¹, Timothy Hodges¹, Mohammed Shakir¹, Mathis Turgeon-Roy¹, Arnaud Weck^1,2, *Raphael St-Gelais^1,2 (1. Department of Mechanical Engineering, University of Ottawa (Canada), 2. Department of Physics, University of Ottawa (Canada))