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[C-10-06]Development of high sensitive plasmonic InGaAs photodiode for high speed of next-generation optical communication system

○Toshiki Masuzawa1, Takuo Tanemura2, Atsushi Ono1,3 (1. Shizuoka University, 2. The University of Tokyo, 3. Research Institute of Electronics, Shizuoka University)
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Keywords:

Plasmonics,Optical communication,Beyond5G,Waveguide,Metal grating,Photodiode