[NC-002] Nano-scale Characterization of the Structure and Properties of Sustainable Materials 2

10:00 AM - 10:15 AM JST(1:00 AM - 1:15 AM UTC)

[NC-2-01] Operando Nanobeam X-ray Diffraction Analysis of strain in AlGaN/GaN HEMTs with 10-µm gate

*Jumpei Yamamoto¹, Tetsuya Tohei¹, Yasuhiko Imai², Zhuo Diao¹, Kazushi Sumitani², Shigeru Kimura², Ryota Ochi³, Taketomo Sato³, Tamotsu Hashizume⁴, Akira Sakai¹ (1. Graduate School of Engineering Science, The University of Osaka, 2. Japan Synchrotron Radiation Research Institute, 3. Research Center For Integrated Quantum Electronics (RCIQE), Hokkaido University, 4. Institute of Materials and Systems for Sustainability (IMaSS), Nagoya University)