[NC-002] Nano-scale Characterization of the Structure and Properties of Sustainable Materials 2

10:30 AM - 10:45 AM JST(1:30 AM - 1:45 AM UTC)

[NC-2-03] Influence of threading dislocations on surface pit characteristics in 4H-SiC epitaxial wafers via non-destructive identification

*Juhyeong Sun¹, Kousei Takahashi², Yasutaka Matsubara², Michio Kawase², Keisuke Seo², Kenta Murayama³, Kentaro Kutsukake^1,2, Toru Ujihara^1,2, Shunta Harada^1,2 (1. Graduate School of Engineering, Nagoya University, Japan, 2. Institute of Materials and Systems for Sustainability (IMaSS), Nagoya University, Japan, 3. Mipox Corporation, Japan)