OS19(3) Mechano photonics engineering and optical applications (3)

5:30 PM - 5:45 PM JST(8:30 AM - 8:45 AM UTC)

[OS19-13-01] An alignment monitor using a three-dimensional measurement grid consisting of multiple absolute distance interferometers

*Tatsuya KUME¹, Masaki MICHIHATA², Satoru TAKAHASHI² (1. High Energy Accelerator Resarch Organization, 2. The University of Tokyo)

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