Presentation Information
[OS05-13-01]Cutting force model for ultrasonic-assisted ultra-precision turning of zinc selenide with straight-nosed diamond tools
*Minghan Chen1, Xiangyu Zhou1, Wentao Zhang1, Shibo Zhang1, Hanqiang Wu1, Linhe Sun2, Yongbo Wu1,3 (1. Southern University of Science and Technology, 2. The Hong Kong Polytechnic University, 3. Shenzhen Engineering Research Center for Semiconductor-specific Equipment)
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