Presentation Information
[OS23-5-01]Field-Driven Magnetic Compound Fluid PolishingA Complete-Dragging Criterion and Performance Analysis
*Yufeng Xue1, Ningyan Zhang1, Yangke Zheng1, Yongbo Wu1,2 (1. Southern University of Science and Technology, 2. Shenzhen Engineering Research Center for Semiconductor-specific Equipment)
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