OS23(4) Micro fabrications for functional surfaces (4)

6:30 PM - 6:45 PM JST(9:30 AM - 9:45 AM UTC)

[OS23-16-01] Modeling and analysis of transitions between indentation and tapping mode in nanolithography with self-excited microcantilevers

*Masahiro Oki¹, Hiroshi Yabuno², Ichiro Ogura³, Kiwamu Ashida⁴ (1. Doctoral Program in Intelligent and Mechanical Interaction Systems, University of Tsukuba, 2. Institute of Systems and Information Engineering, University of Tsukuba, 3. AIST Solutions Co., Business Coordination Department, 4. 4 Department of Electronics and Manufacturing, National Institute of Advanced Industrial Science and Technology (AIST))

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