OS23(1) Micro fabrications for functional surfaces (1)

2:45 PM - 3:00 PM JST(5:45 AM - 6:00 AM UTC)

[OS23-4-01] Molecular Dynamics Simulation of Silicon CMP Using a Surface Hydration Layer Model Based on Potential Control

*Fumito Suga¹, Jun Shimizu², Teppei Onuki², Hirotaka Ojima², Kazuki Kaneko³, Libo Zhou⁴ (1. Graduate School of Ibaraki University, 2. Ibaraki University, 3. Okayama University, 4. Sun Yat-Sen University)

Password required to view