[Th-P] Semiconductor hybrid systems and novel devices

[Th-P-107] Nanoelectromechanical Broadband Phonon Source

Tapani Makkonen¹, Oili Ylivaara¹, 〇Jouni Ahopelto¹ (1. VTT Technical Research Centre of Finland (Finland))

We demonstrate a new device, BeamBAW, for efficient electromechanical excitation. The concept is based on freestanding nanoscale bulk acoustic wave transducers which can be integrated directly into mechanical or optomechanical nanostructures. BeamBAW provides broad bandwidth and small footprint and acts as a source and a detector.