Presentation Information
[Th-P-116]Doping Engineering of Double-SOI Structures for Two-Channel Tunneling Transistors
〇Yu Cheng1, Giulio Galderisi2, Ulrich Wulf1,3, Christian Matthus4, Maciej Wiatr5, Jens Trommer2, Shengqiang Zhou1 (1. Helmholtz-Zentrum Dresden-Rossendorf (HZDR) (Germany), 2. Namlab gGmbH (Germany), 3. Brandenburg University of Technology Cottbus-Senftenberg (Germany), 4. Faculty of Electrical and Computer Engineering, Technische Universität Dresden (Germany), 5. Wiatec® GmbH (Germany))