[Th-P2-G] Qunatum dots & related technologies

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[Th-P2-G-05] Uniform Li Doping for MgO Films Grown on MgO (100) Substrates by Mist CVD

〇Takumi Hosaka¹, Sanshiro Nakashima¹, Kyosuke Tanaka¹, Kotaro Ogawa¹, Tomohiro Yamaguchi¹, Tohru Honda¹, Takeyoshi Onuma¹ (1. Kogakuin Univ. (Japan))

Li-doped MgO films were grown on MgO (100) substrates using our custom-built hot-wall-type mist CVD system. Surface AFM images exhibited surface roughening as we increased [Li]/[Mg] upto 20 mol%. SIMS exhibited uniform Li atoms in the MgO thin film.