[Tu-A2-C] Photonic crystal and metasurface

12:15 PM - 12:30 PM JST(3:15 AM - 3:30 AM UTC)

[Tu-A2-C-05] Ultraviolet Metalenses Monolithically Fabricated on 8-inch Quartz Wafers

〇Yeonsang Park^1,2, Jaewon Jang^1,2, Hui Jae Cho³ (1. Chungnam Nat'l Univ. (Korea), 2. Inst. of Quantum Systems (Korea), 3. Nat'l Nano Fab Center (Korea))

We demonstrate the wafer-scale fabrication of quartz-monolithic UV metalenses on an 8-inch wafer using ArF photolithography. This platform eliminates absorption losses and interfacial delamination issues, enabling scalable mass production of high-performance UV meta-optics.