Presentation Information
[Tu-P-45]Optical and Electrical Evaluation of Excimer-Light-Induced
Surface Electric Fields in GaAs
〇Haruto Monda1, Kazuki Ueda1, Takayuki Hasegawa1, Hideo Wada1, Masatoshi Koyama1, Akihiko Fujii1, Akihiro Shimizu2, Toshihiko Maemoto1 (1. Osaka Inst. of Tech. (Japan), 2. Semiconductor Related Group, Marketing Management Division, Ushio Inc. (Japan))