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Wed. Dec 2, 2026

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Low-Warpage PEALD SiO<sub>2</sub> Moisture Barriers for Flexible OLED Thin-Film Encapsulation

Advanced Materials, Processes, Circuits, Devices, and Systems for Soft Electronics

The 33rd International Display Workshops (IDW '26)

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[4]Low-Warpage PEALD SiO₂ Moisture Barriers for Flexible OLED Thin-Film Encapsulation

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[4]Low-Warpage PEALD SiO2 Moisture Barriers for Flexible OLED Thin-Film Encapsulation

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[4]Low-Warpage PEALD SiO₂ Moisture Barriers for Flexible OLED Thin-Film Encapsulation