Presentation Information

[4]A-Three-Component Intelligent Dynamic Etching System and Method for Metal Interconnection in LCD Manufacturing

*Zhihui Song1, Huihua Liao1, Feng Liu1, Tenghui He1, Qing Jiang1, Kang long1, Zilin Chen1, Guo Wang1, Chen I Huang1, James Hsu1, Wade Chen1 (1. HKC (China))

Keywords:

LCD,Wet Etching,Taper Angle Control,copper Etchant,Flexible Manufacturing


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