Presentation Information
[4]A-Three-Component Intelligent Dynamic Etching System and Method for Metal Interconnection in LCD Manufacturing
*Zhihui Song1, Huihua Liao1, Feng Liu1, Tenghui He1, Qing Jiang1, Kang long1, Zilin Chen1, Guo Wang1, Chen I Huang1, James Hsu1, Wade Chen1 (1. HKC (China))
Keywords:
LCD,Wet Etching,Taper Angle Control,copper Etchant,Flexible Manufacturing
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