[FMCp2] Materials and Measurements

[7] Machine Learning-Guided Prediction of the Mechanical–Optical Trade-off in Amorphous Al-Doped SiCN Thin Films for Anti-Reflection Coatings

*Jong-Hyun Jang¹, Hyeon Seok Lee¹, Hyunhyang Kim², Dahye Kim², Han-Ki Kim¹ (1. Sungkyunkwan University (Korea), 2. Samsung Display (Korea))

Keywords:

AR coatings,Mechanical–optical trade-off,Machine-learning,Al-doped SiCN