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Photochemical Cage-to-Network Conversion in Fluorinated Siloxane Spin-on-Glass Films under 182/254 nm DUV Irradiation

Materials and Measurements

The 33rd International Display Workshops (IDW '26)

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[11]Photochemical Cage-to-Network Conversion in Fluorinated Siloxane Spin-on-Glass Films under 182/254 nm DUV Irradiation

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