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Plasma Enhanced ALD Al2O3 Thin Film Encapsulation and Toward Al2O3/TiO2 Nanolaminate for Large-Area QD-LEDs

Materials and Measurements

The 33rd International Display Workshops (IDW '26)

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[12]Plasma Enhanced ALD Al₂O₃ Thin Film Encapsulation and Toward Al₂O₃/TiO₂ Nanolaminate for Large-Area QD-LEDs

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Presentation Information

[12]Plasma Enhanced ALD Al2O3 Thin Film Encapsulation and Toward Al2O3/TiO2 Nanolaminate for Large-Area QD-LEDs

Keywords:

Comment

[12]Plasma Enhanced ALD Al₂O₃ Thin Film Encapsulation and Toward Al₂O₃/TiO₂ Nanolaminate for Large-Area QD-LEDs