Presentation Information
[1(Invited)]Overview of Radiation Hardened FD-SOI Pixel Detector Process Development(20min.)
*Ikuo Kurachi1, Yasuo Arai2 (1. D&S Inc. (Japan), 2. High Energy Accelerator Research Organization (Japan))
Keywords:
SOI pixel detector,fabrication process,radiation hardness,photo diode,SOI-MOSFET
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