Presentation Information
[4]High-Sensitivity NO2 Gas Sensors Based on ZnON Thin Films via Nitrogen Flow Rate Control
*HyukJu Ahn1, Jisu Kim1, Kyeingsik Ko1, SeungMin Lee1, InHo Kim1, Sion Kim1, GangGuk Park1, YoungWoo Kim1, SangJik Kwon2, Eou-Sik Cho1,2, Min-Kyu Park1 (1. Gachon University of Semiconductor Engineering (Korea), 2. Gachon University of Electronics Engineering (Korea))
Keywords:
ZnON (N-doped ZnO),NO2 gas sensor,Low temperature
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