[MEET1] Novel Materials, Fundamental Components and Process Technologies (1)

[2(Invited)] High Performance EUV (Extreme Ultraviolet) Light Sources with Cold Cathode Electron Beam(C-beam) Excitation Method(20min.)

*Kyu Chang Park^1,2, Umush Apugade¹, Iksu Kim¹ (1. Kyung Hee University (Korea), 2. World Beam solution Inc. (Korea))

Keywords:

Cold cathode electron beam(C-beam),,EUV(Extreme ultraviolet),,electron emission,,Carbon nanotube (CNT) emitters