Presentation Information
[2(Invited)]Towards Advanced Selective Etching of Si (111) over Si (100) Substrates for Micro-LED Processing(20min.)
Heng Liu1, Tianxi Yang1, Shuaihao Li1, Yuhang Wan1, Yuchen Lu1, *Jie Sun1, Qun Yan1 (1. Fuzhou University (China))
Keywords:
Micro-LEDs,Selective etiching,Si substrate
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