Presentation Information
[8]Low-Thermal-Budget 80°C PEALD Al2O3 Passivation for Reliable a-IGZO TFTs
*Kyeongsik Ko1, Jisu Kim1, Hyuk Ju Ahn1, Gang Guk Park1, In Ho Kim1, Sion Kim1, Young Woo Kim1, Sang Jik Kwon1, Eou-Sik Cho1, Min-kyu Park1 (1. Gachon University (Korea))
Keywords:
a-IGZO TFT,Al2O3 Passivation,PEALD,Bias-Stress Stability,Low-Temperature Processing
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