[O12-2] Auxiliary-Circuit-Based Converters for Soft Switching and Performance Enhancement

9:30 AM - 9:50 AM JST(12:30 AM - 12:50 AM UTC)

[O12-2-04] Cost-Effective Electrical Variable Capacitor Utilizing Fast Recovery Diode for RF Plasma

*Heewon Choi¹, Yongsug Suh¹ (1. Jeonbuk National University, Korea (Korea))

Keywords:

Electrical Variable Capacitor,Impedance Matching Network,RF Plasma,Vacuum Variable Capacitor