Presentation Information
[O6-4-04]Design and Control of a Multi-Degree-of-Freedom Magnetically Levitated Planar Motor
*Keigo Nakata1, Wataru Ohnishi1, Takafumi Koseki1, Yuichiro Nakamura2, Kenji Takahashi2, Hiroyuki Sekiguchi2 (1. The University of Tokyo (Japan), 2. Mitsubishi Electric (Japan))
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