[O6-4] Industrial Instrumentation and Control 2

3:40 PM - 4:00 PM JST(6:40 AM - 7:00 AM UTC)

[O6-4-05] Integration of Gaussian Process Regression and Iterative Learning Control for Scanning Stage with Iron-Core Linear Motors

*Reon Sasaki¹, Wataru Ohnishi¹, Takafumi Koseki¹, Pai-Hsueh Yang², Houng-Joong Kim³, Koichi Sakata⁴ (1. The University of Tokyo (Japan), 2. Nikon Research Corporation of America (USA), 3. Kovery (Korea), 4. Nikon (Japan))

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