Presentation Information

[P1-2-05]Toroidal Core Transformer based Multiport Power Combiner for RF Plasma Source

*Kuang Shi1, Ming Liu1, Shuang Li1, Wei Liu1, YongZhi Zhu1 (1. Shanghai Jiao Tong University (China))

Keywords:

magnetic integration,power combiner,radio frequency power,zero-voltage switching (ZVS) class-D