Presentation Information
[P11]Measurement of Ventilation Effectiveness using Particle and Tracer Gas in Cleanrooms
*Yota Kinoshita1, Tomohiro Kobayashi1, Haruna Yamasawa1, Ryoma Sasaki1, Shigeki Tsuchiya2, Masanori Sasaki2 (1. The University of Osaka (Japan), 2. SANKI ENGINEERING CO.,LTD (Japan))
Keywords:
Cleanrooms,Age of air,Tracer gas methods