ISPlasma2025/IC-PLANTS2025
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Mon. Mar 3, 2025
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4:00 PM - 5:30 PM JST
(7:00 AM - 8:30 AM UTC)
[04P-14]
Deposition of IGZO Film Using High-Power Impulse Magnetron Sputtering
*Taketo Nagata
1
, Kazuya Ota
2
, Kosuke Takenaka
2
, Yuichi Setsuhara
2
, Takayuki Ohta
1
(1. Meijo University (Japan), 2. Osaka University (Japan))
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