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Presentation Information

4:00 PM - 5:30 PM JST(7:00 AM - 8:30 AM UTC)

[04P-13]Ultra-High-Speed Deposition of Diamond-Like Carbon Film on Long Cylindrical Part Surface Using Microwave-Assisted Pulsed DC Plasma CVD

*Taketo Nagai1, Toru Harigai1, Masahiro Esaki1, Akihiko Ito1, Hiroyuki Kousaka1 (1. Gifu University (Japan))
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