Poster Session 1

4:00 PM - 5:30 PM JST(7:00 AM - 8:30 AM UTC)

[04P-27] Comparison of SiO₂ Etching Characteristics of Pentafluoropropanol and Perfluoropropyl Carbinol as Low-GWP Alternatives to Perfluoro Compounds

*Inkyoung Cho¹, Chang-Koo Kim¹ (1. Ajou University (Korea))