Poster Session 1

4:00 PM - 5:30 PM JST(7:00 AM - 8:30 AM UTC)

[04P-29] Heptafluoroisopropyl Trifluoromethyl Ketone as a Low Global Warming Potential Alternative for Plasma Etching

*Junyoung Kim¹, Chang-Koo Kim¹ (1. Ajou University (Korea))