Poster Session 1

4:00 PM - 5:30 PM JST(7:00 AM - 8:30 AM UTC)

[04P-22] Low Resistivity TiAlN Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition

Se-Hyuk Seo¹, Myung-Jin Jung¹, *SE-Hun Kwon¹ (1. Pusan National University (Korea))