ISPlasma2025/IC-PLANTS2025
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Mon. Mar 3, 2025
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4:00 PM - 5:30 PM JST
(7:00 AM - 8:30 AM UTC)
[04P-40]
Fatigue Life of AlON/HfO
X
Moisture-Barrier Films Deposited by HiPIMS/RFMS
*Li-Chun Chang
1
, Sheng-En Lin
1
(1. Ming Chi University of Technology (Taiwan))
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