Poster Session 1

4:00 PM - 5:30 PM JST(7:00 AM - 8:30 AM UTC)

[04P-23] Improving In₂O₃ Channel Defects via ALD Plasma CF₄ Treatment

*Yu-Shan Hsieh¹, Yi-Xuan Chen², Yi-Xin He¹, Chao-Hsin Chien², Yu-Hsien Lin¹ (1. National United University (Taiwan), 2. National Yang Ming Chiao Tung University (Taiwan))