Nanomaterials 4

2:30 PM - 3:00 PM JST(5:30 AM - 6:00 AM UTC)

[05pB09I] Three-Dimensional Self-Ordering and Alignment Control of Ge Nanodots Fabricated by Chemical Vapor Deposition

*Wei-Chen Wen¹, Bernd Tillack^{1, 2} and Yuji Yamamoto^{1, 3} (1. IHP GmbH - Leibniz Institute for High Performance Microelectronics (Germany), 2. Technische Universität Berlin (Germany), 3. Nagoya University (Japan))