Presentation Information
[05P-46]New HVPE Sublimation Sandwich Method for the Formation of Si Layer on SiC Substrates
*Eunmin Kwon1, Kyoung Hwa Kim2, Seonwoo Park1, Suhyun Mun1, Sohee Kim1, Donghyeon Jeong1, Min Yang1, Jae Hak Lee1,3, Hunsoo Jeon2, Hyung Soo Ahn1 (1. National Korea Maritime & Ocean University (Korea), 2. Busan Techno Park (Korea), 3. LNBS Co., Ltd (Korea))