Poster Session 2

4:00 PM - 5:30 PM JST(7:00 AM - 8:30 AM UTC)

[05P-62] Growth of High-Crystal Quality Epitaxial AlN Films on WS₂ via Van der Waals Epitaxy

*Wei-Chun Chen^1,3, Mu-Huan Lee², Wei-Lin Wang¹, Hung-Pin Chen¹, Yu-Wei Lin¹, Shih-Feng Tseng², Fong-Zhi Chen¹ (1. Taiwan Instrument Research Institute, National Applied Research Laboratories (Taiwan), 2. Department of Mechanical Engineering, National Taipei University of Technology (Taiwan), 3. Dennovation Frontier Institute of Research for Science and Technology, National Taipei University of Technology (Taiwan))