Presentation Information
[05P-62]Growth of High-Crystal Quality Epitaxial AlN Films on WS2 via Van der Waals Epitaxy
*Wei-Chun Chen1,3, Mu-Huan Lee2, Wei-Lin Wang1, Hung-Pin Chen1, Yu-Wei Lin1, Shih-Feng Tseng2, Fong-Zhi Chen1 (1. Taiwan Instrument Research Institute, National Applied Research Laboratories (Taiwan), 2. Department of Mechanical Engineering, National Taipei University of Technology (Taiwan), 3. Dennovation Frontier Institute of Research for Science and Technology, National Taipei University of Technology (Taiwan))