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Presentation Information

4:00 PM - 5:30 PM JST(7:00 AM - 8:30 AM UTC)

[05P-05]Influence of External Magnetic Field on Plasma Density in a Low-Aspect Ratio, Large-Diameter, RF Plasma Source Using a Spiral Antenna

*Takeru Furukawa1, Riku Hosoda1, Keigo Kamiuchi1, Hiromasa Takeno1 (1. Kobe University (Japan))
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