Presentation Information

[05P-63]Observation of Point Defect and Carrier Lifetime Distributions in Ion Implanted SiC PiN Diodes

*Tong Li1, Hitoshi Sakane2, Shunta Harada3, Masashi Kato1 (1. Nagoya Inst. of Tech. (Japan), 2. SHI-ATEX Co. Ltd. (Japan), 3. Nagoya Univ. (Japan))