Poster Session 2

4:00 PM - 5:30 PM JST(7:00 AM - 8:30 AM UTC)

[05P-63] Observation of Point Defect and Carrier Lifetime Distributions in Ion Implanted SiC PiN Diodes

*Tong Li¹, Hitoshi Sakane², Shunta Harada³, Masashi Kato¹ (1. Nagoya Inst. of Tech. (Japan), 2. SHI-ATEX Co. Ltd. (Japan), 3. Nagoya Univ. (Japan))