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4:00 PM - 5:30 PM JST
(7:00 AM - 8:30 AM UTC)
[05P-51]
Effect of Deposition Temperature on Deposition of Gallium Oxide Films Using Hot-Wall Type Mist CVD
*Tomoki Iwata
1
, Ohta Takayuki
1
(1. Department of Electrical and Electronic Engineering, Meijo University (Japan))
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