Poster Session 2

4:00 PM - 5:30 PM JST(7:00 AM - 8:30 AM UTC)

[05P-06] Spatial Distribution of Ion Density in a RF Magnetron Plasma with PFA Target for Hydrophobic Film Preparation

*Yasunori Ohtsu¹, Ryohei Kuno¹, Takeshi Yasunaga², Yasuyuki Ikegami¹ (1. Saga University (Japan), 2. Osaka Electro-Communication University (Japan))