Presentation Information
[05P-06]Spatial Distribution of Ion Density in a RF Magnetron Plasma with PFA Target for Hydrophobic Film Preparation
*Yasunori Ohtsu1, Ryohei Kuno1, Takeshi Yasunaga2, Yasuyuki Ikegami1 (1. Saga University (Japan), 2. Osaka Electro-Communication University (Japan))